Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...

This has led to the introduction of the new strategy of Process Window Discovery, Expansion and Control. Fig. 2: Depth of focus budget by design rule. Discovery.

Fundamentals of Industrial Process, Measurement, and Control (FG05) is a lecture-based course that provides an overview of industrial measurement and control. Technicians, engineers and managers learn ...

SPC can also be used to meet ISO requirements for "continual improvement" as well as FDA requirements to "control and monitor production processes". SPC can even be used to monitor complaint rates, to ...

Introduction to Inventory Control. Inventory control is a major element of an efficient operation for any business that buys and resells goods. Typical goals of inventory management include ...

This course is an introduction to the foundations of nonlinear control theory, with an emphasis on feedback stabilization. As needed, topics from differential geometry and other mathematical ...

The recent introduction of integrated SIS brings this critical process-safety system onto the same platform as the base process control system (BPCS). Now, the two systems can be programmed, ...